Entegris, Inc.
Entegris, Inc.
129 Concord Road, Billerica, MA 01821 USA
T +1 978 436 6500
F: +1 978 436 6735
Website: www.entegris.com
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Designed for use with corrosive chemicals in semiconductor processing applications, these valves provide system flexibility and easy installation into any fluid handling system.

  • Weir-style design streamlines the flow path and eliminates dead volume, providing gentle flow while keeping the flow path clean and free from contaminants.
  • Single-piece diaphragm does not need adhesive and will not separate, increasing reliability in vacuum applications PFA and PTFE wetted surfaces provide chemical
    • more
1" Integra Plus WS Pneumatic
Unit of Measure
1 2 3 4 

Item #

Connection Type

Length

WSP16-2C-16FF N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2C-16FF-3 N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2C-16FF-6 N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2C-16FF-P2 N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2C-16FS N/A Flaretek® x Flaretek® Spacesaver N/A 7.34 in
WSP16-2C-16FS-3 N/A Flaretek® x Flaretek® Spacesaver N/A 7.34 in
WSP16-2C-16FS-6 N/A Flaretek® x Flaretek® Spacesaver N/A 7.34 in
WSP16-2C-16FS-P2 N/A Flaretek® x Flaretek® Spacesaver N/A 7.34 in
WSP16-2C-16KK N/A PrimeLock® x PrimeLock® N/A 7.24 in
WSP16-2C-16KK-P2 N/A PrimeLock® x PrimeLock® N/A 7.24 in
WSP16-2C-16KV N/A PrimeLock® x PrimeLock® Spacesaver N/A 6.98 in
WSP16-2C-16KV-P2 N/A PrimeLock® x PrimeLock® Spacesaver N/A 6.98 in
WSP16-2C-16PF N/A PureBond® pipe x Flaretek® N/A 6.53 in
WSP16-2C-16PF-3 N/A PureBond® pipe x Flaretek® N/A 6.53 in
WSP16-2C-16PF-6 N/A PureBond® pipe x Flaretek® N/A 6.53 in
WSP16-2C-16PF-P2 N/A PureBond® pipe x Flaretek® N/A 6.53 in
WSP16-2C-16PK N/A PureBond® pipe x PrimeLock® N/A 6.68 in
WSP16-2C-16PK-P2 N/A PureBond® pipe x PrimeLock® N/A 6.68 in
WSP16-2C-16PP N/A PureBond® pipe x PureBond® pipe N/A 6.12 in
WSP16-2C-16PP-P2 N/A PureBond® pipe x PureBond® pipe N/A 6.12 in
WSP16-2C-16PS N/A PureBond® pipe x Flaretek® Spacesaver N/A 6.59 in
WSP16-2C-16PS-3 N/A PureBond® pipe x Flaretek® Spacesaver N/A 6.59 in
WSP16-2C-16PS-6 N/A PureBond® pipe x Flaretek® Spacesaver N/A 6.59 in
WSP16-2C-16PS-P2 N/A PureBond® pipe x Flaretek® Spacesaver N/A 6.59 in
WSP16-2C-16PV N/A PureBond® pipe x PrimeLock® Spacesaver N/A 6.42 in
Unit of Measure
1 2 3 4