Entegris, Inc.
Entegris, Inc.
129 Concord Road, Billerica, MA 01821 USA
T +1 978 436 6500
F: +1 978 436 6735
Website: www.entegris.com
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Designed for use with corrosive chemicals in semiconductor processing applications, these valves provide system flexibility and easy installation into any fluid handling system.

  • Weir-style design streamlines the flow path and eliminates dead volume, providing gentle flow while keeping the flow path clean and free from contaminants.
  • Single-piece diaphragm does not need adhesive and will not separate, increasing reliability in vacuum applications PFA and PTFE wetted surfaces provide chemical
    • more
3/4" Integra Plus WS Pneumatic
Unit of Measure
1 2 3 4 

Item #

Connection Type

Length

WSP12-2C-12PV-P2 N/A PureBond® pipe x PrimeLock® Spacesaver N/A 6.18 in
WSP12-2C-12SS N/A Flaretek® Spacesaver x Flaretek® Spacesaver N/A 6.44 in
WSP12-2C-12SS-3 N/A Flaretek® Spacesaver x Flaretek® Spacesaver N/A 6.44 in
WSP12-2C-12SS-6 N/A Flaretek® Spacesaver x Flaretek® Spacesaver N/A 6.44 in
WSP12-2C-12SS-P2 N/A Flaretek® Spacesaver x Flaretek® Spacesaver N/A 6.44 in
WSP12-2C-12VV N/A PrimeLock® Spacesaver x PrimeLock® Spacesaver N/A 6.24 in
WSP12-2C-12VV-P2 N/A PrimeLock® Spacesaver x PrimeLock® Spacesaver N/A 6.24 in
WSP12-2C-12FF-EC N/A Flaretek® x Flaretek® N/A 6.37 in
WSP12-2U-12FF N/A Flaretek® x Flaretek® N/A 6.37 in
WSP12-2U-12FF-3 N/A Flaretek® x Flaretek® N/A 6.37 in
WSP12-2U-12FF-6 N/A Flaretek® x Flaretek® N/A 6.37 in
WSP12-2U-12FF-P2 N/A Flaretek® x Flaretek® N/A 6.37 in
WSP12-2U-12FS N/A Flaretek® x Flaretek® Spacesaver N/A 6.41 in
WSP12-2U-12FS-3 N/A Flaretek® x Flaretek® Spacesaver N/A 6.41 in
WSP12-2U-12FS-6 N/A Flaretek® x Flaretek® Spacesaver N/A 6.41 in
WSP12-2U-12FS-P2 N/A Flaretek® x Flaretek® Spacesaver N/A 6.41 in
WSP12-2U-12KK N/A PrimeLock® x PrimeLock® N/A 6.80 in
WSP12-2U-12KK-P2 N/A PrimeLock® x PrimeLock® N/A 6.80 in
WSP12-2U-12KV N/A PrimeLock® x PrimeLock® Spacesaver N/A 6.52 in
WSP12-2U-12KV-P2 N/A PrimeLock® x PrimeLock® Spacesaver N/A 6.52 in
WSP12-2U-12PF N/A PureBond® pipe x Flaretek® N/A 6.25 in
WSP12-2U-12PF-3 N/A PureBond® pipe x Flaretek® N/A 6.25 in
WSP12-2U-12PF-6 N/A PureBond® pipe x Flaretek® N/A 6.25 in
WSP12-2U-12PF-P2 N/A PureBond® pipe x Flaretek® N/A 6.25 in
WSP12-2U-12PK N/A PureBond® pipe x PrimeLock® N/A 6.46 in
Unit of Measure
1 2 3 4