Entegris, Inc.
Entegris, Inc.
129 Concord Road, Billerica, MA 01821 USA
T +1 978 436 6500
F: +1 978 436 6735
Website: www.entegris.com
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Unit of Measure

Specifications

Port Connection

 1/2" "SpaceSaver" on Port 2

Nut Material

 PFA

A

 5.28 in

B

 2.64 in

C

 4.71 in