Entegris, Inc.
Entegris, Inc.
129 Concord Road, Billerica, MA 01821 USA
T +1 978 436 6500
F: +1 978 436 6735
Website: www.entegris.com
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Unit of Measure

Specifications

Valve Type

 Normally Closed

Pilot Port Connection

 1/4'' OD Tube

Port Connection Size / Type

 1/2'' Pillar® S300

Pilot Port Location

 P4

Specials

 None

Nut Material

 Pillar® S300