Entegris, Inc.
Entegris, Inc.
129 Concord Road, Billerica, MA 01821 USA
T +1 978 436 6500
F: +1 978 436 6735
Website: www.entegris.com
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Unit of Measure

Specifications

Valve Type

 N/A Normally Closed

Pilot Port Connection

 N/A 1/4'' OD Tube

Port Connection Size / Type

 N/A 1/2" Flaretek®

Pilot Port Location

 N/A Over port 1 (Standard)

Specials

 N/A None

Nut Material

 N/A PFA Flaretek® Nut