Entegris, Inc.
Entegris, Inc.
129 Concord Road, Billerica, MA 01821 USA
T +1 978 436 6500
F: +1 978 436 6735
Website: www.entegris.com
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Designed for use with corrosive chemicals in semiconductor processing applications, these valves provide system flexibility and easy installation into any fluid handling system.

  • Weir-style design streamlines the flow path and eliminates dead volume, providing gentle flow while keeping the flow path clean and free from contaminants.
  • Single-piece diaphragm does not need adhesive and will not separate, increasing reliability in vacuum applications PFA and PTFE wetted surfaces provide chemical resistance suitable for use with ultrapure chemicals, solvents and DI water.
  • A variety of connections including PrimeLock®, Flaretek®, “SpaceSaver” and PureBond® provide system flexibility and easy installation into any fluid handling system; bipolar connections (PureBond x PrimeLock or Flaretek) further reduce the footprint and lower costs.
  • Remote electronic position sensing options are available for added safety.
1" Integra Plus WS Pneumatic
Unit of Measure
1 2 3 4 

Item #

Connection Type

Length

WSP16-2C-16PV-P2 N/A PureBond® pipe x PrimeLock® Spacesaver N/A 6.42 in
WSP16-2C-16SS N/A Flaretek® Spacesaver x Flaretek® Spacesaver N/A 7.06 in
WSP16-2C-16SS-3 N/A Flaretek® Spacesaver x Flaretek® Spacesaver N/A 7.06 in
WSP16-2C-16SS-6 N/A Flaretek® Spacesaver x Flaretek® Spacesaver N/A 7.06 in
WSP16-2C-16SS-P2 N/A Flaretek® Spacesaver x Flaretek® Spacesaver N/A 7.06 in
WSP16-2C-16VV N/A PrimeLock® Spacesaver x PrimeLock® Spacesaver N/A 6.72 in
WSP16-2C-16VV-P2 N/A PrimeLock® Spacesaver x PrimeLock® Spacesaver N/A 6.72 in
WSP16-2C-16FF-EC N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2U-16FF N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2U-16FF-3 N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2U-16FF-6 N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2U-16FF-P2 N/A Flaretek® x Flaretek® N/A 6.94 in
WSP16-2U-16FS N/A Flaretek® x Flaretek® Spacesaver N/A 7.34 in
WSP16-2U-16FS-3 N/A Flaretek® x Flaretek® Spacesaver N/A 7.34 in
WSP16-2U-16FS-6 N/A Flaretek® x Flaretek® Spacesaver N/A 7.34 in
WSP16-2U-16FS-P2 N/A Flaretek® x Flaretek® Spacesaver N/A 7.34 in
WSP16-2U-16KK N/A PrimeLock® x PrimeLock® N/A 7.24 in
WSP16-2U-16KK-P2 N/A PrimeLock® x PrimeLock® N/A 7.24 in
WSP16-2U-16KV N/A PrimeLock® x PrimeLock® Spacesaver N/A 6.98 in
WSP16-2U-16KV-P2 N/A PrimeLock® x PrimeLock® Spacesaver N/A 6.98 in
WSP16-2U-16PF N/A PureBond® pipe x Flaretek® N/A 6.53 in
WSP16-2U-16PF-3 N/A PureBond® pipe x Flaretek® N/A 6.53 in
WSP16-2U-16PF-6 N/A PureBond® pipe x Flaretek® N/A 6.53 in
WSP16-2U-16PF-P2 N/A PureBond® pipe x Flaretek® N/A 6.53 in
WSP16-2U-16PK N/A PureBond® pipe x PrimeLock® N/A 6.68 in
Unit of Measure
1 2 3 4