Product Catalog
Designed for use with corrosive chemicals in semiconductor processing applications, these valves provide system flexibility and easy installation into any fluid handling system.
- Weir-style design streamlines the flow path and eliminates dead volume, providing gentle flow while keeping the flow path clean and free from contaminants.
- Single-piece diaphragm does not need adhesive and will not separate, increasing reliability in vacuum applications PFA and PTFE wetted surfaces provide chemical resistance suitable for use with ultrapure chemicals, solvents and DI water.
- A variety of connections including PrimeLock®, Flaretek®, “SpaceSaver” and PureBond® provide system flexibility and easy installation into any fluid handling system; bipolar connections (PureBond x PrimeLock or Flaretek) further reduce the footprint and lower costs.
- Remote electronic position sensing options are available for added safety.
Unit of Measure
Specifications
Connection Type |
N/A PrimeLock® Spacesaver x PrimeLock® Spacesaver |
Valve Operator |
N/A Manual Multi-turn |
Size |
N/A 1 1/4" x 1 1/4" |
Operating Temperature [Min] |
N/A 21 ºC70 ºF |
Operating Temperature [Max] |
N/A 100 ºC212 ºF |
Operating Pressure [Min] |
N/A 913 mbar27 inHg |
Operating Pressure [Max] |
N/A 80 psi552 kPa |
Cv Coefficient |
N/A 25.8 |
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