CR8 3-way series valves are designed to divert one media stream into two directions or alternate two media streams into one, minimizing the footprint. The compact, CR8 valve effectively handles temperatures up to 130°C (266°F) in corrosive environments for wet etch and clean applications. At this temperature, the CR8 3-way valve is rated to 276 kPa (40 psig) media.
Users will have a variety of connection options available in 1/ 2" and 3/ 4" port sizes. Without exposed metal hardware, the valve is completely sealed and protected from harsh chemical environments. The end result is a highly effective valve that simplifies your system design and increases product longevity.
- High-purity corrosive chemical handling for chemical line size in 1/ 2" and 3/ 4"
- All semiconductor wet clean process chemicals
- Transporting and protecting your high-purity chemicals